Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5240381A · kind A · utility
3Cited by
5References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 1992 |
| Grant date | Aug 31, 1993 |
| Priority date | — |
| Expiry date | Feb 12, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J41/14
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.