Scanning electron beam microscope with high resolution at low accelerating voltage
US5241176A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 2, 1991 |
| Grant date | Aug 31, 1993 |
| Priority date | — |
| Expiry date | Dec 2, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam device having a single pole electromagnetic objective lens whose pole top face is positioned in front of a sample as viewed from the side of an electron beam source. A secondary electron detector is provided in the vicinity of the pole top face of an inner cylinder of the objective lens. The objective lens has a circular cylindrical or conical shape at the top of the objective lens and the vertical angle of the circular cylindrical or conical shape is 45.degree.-90.degree.. The working distance between the top of the objective lens and sample is less than 6 mm. It is possible to survey the sample with a resolving power corresponding to a dimension about one-half that of the prior art under low accelerating voltage conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.