Ion neutralizer
US5243189A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 22, 1992 |
| Grant date | Sep 7, 1993 |
| Priority date | — |
| Expiry date | Apr 22, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/14
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An ion neutralizer which neutralizes electric charges on ions and produces a fast atom beam in an ultra-high vacuum comprising: an ion source disposed in a vacuum container; a hollow container disposed in the vacuum container, the hollow container being closed at both ends thereof except for an ion beam entrance hole provided in one end portion thereof and a fast atom beam exit hole provided in the other end portion thereof; a metal vapor generating source comprising a filament wound with a fine wire or ribbon of a metal selected from titanium, magnesium and aluminum, the filament being disposed in the hollow container in such a manner as to surround an axis connecting the ion beam entrance hole and the fast atom beam exit hole; a vacuum pump connected to the vacuum container; and a filament heating power supply disposed outside the vacuum container and the hollow container and connected to the filament.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.