Concentrator funnel for vacuum line particle monitors
US5247188A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 23, 1992 |
| Grant date | Sep 21, 1993 |
| Priority date | — |
| Expiry date | Jan 23, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2001/2223
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A converging funnel is placed in an exhaust line to direct substantially all the gas flow in the exhaust line to the sensing laser beam of a particle sensor, thereby preventing deposition of species carried by the gas from depositing on the particle sensor. By concentrating substantially all gas flow through the laser beam, the particle count rate is increased because substantially all particles carried by the exhaust gas is channeled through the laser beam. Further, the particle sensor is also prevented from adverse heating effects of the exhaust gas. In one embodiment, the converging funnel is mounted to the interior wall of the exhaust line by a centering ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.