Semiconductor pick-and-place machine calibration apparatus
US5247844A · kind A · utility
11Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 25, 1991 |
| Grant date | Sep 28, 1993 |
| Priority date | — |
| Expiry date | Oct 25, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K13/089
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An apparatus and method of performing a calibration of the accuracy of placement of semiconductor chips or devices by a pick-and-place machine. The chips are placed on an adhesive-backed glass plate that has calibrated etch marks whose dimensions are chosen to aid the inspector in estimating, or carefully measuring in an optic comparator, the amount of placement error that the machine is causing. The calibration would be performed on a periodic basis as a preventive maintenance program.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.