Megasonic cleaning system
US5247954A · kind A · utility
63Cited by
3References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1991 |
| Grant date | Sep 28, 1993 |
| Priority date | — |
| Expiry date | Nov 12, 2011 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B3/12
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Megasonic cleaning system for use in cleaning of electronic or other items such as semiconductor wafers or semiconductor substrates in a wafer carrier. Formed piezoelectric transducers are bonded to a tubular envelope at a low temperature and are excited at a first frequency or a second higher frequency for cleaning of items in a cleaning tank. A novel sealing assembly accommodates tubular envelopes of varying diameters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.