MBE effusion source with asymmetrical heaters
US5253266A · kind A · utility
24Cited by
10References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 1992 |
| Grant date | Oct 12, 1993 |
| Priority date | — |
| Expiry date | Jul 20, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/243
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An effusion source, for the generation of molecular beams, adapted to be positioned at an angle to the horizontal, within a vacuum chamber, of an MBE system including heating structures around the source to create uniform temperatures across the source in planes substantially parallel to the horizontal to cause uniform temperatures in planes substantially parallel to the horizontal in materials placed within the source and intended for MBE applications. A number of heating embodiments are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.