INTEVAC, INC.
🏢 View company profile →121Patents
71Active
121Granted
52Portfolio score
Filing activity: Jul 19, 1976 → Aug 24, 2022 · 17 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6285018A | Electron bombarded active pixel sensor | Electricity | 78 | Expired |
| US5369267A | Microchannel image intensifier tube with novel sealing feature | Electricity | 66 | Expired |
| US5830327A | Methods and apparatus for sputtering with rotating magnet sputter sources | Electricity | 64 | Expired |
| US5215420A | Substrate handling and processing system | Emerging Cross-Sectional Technologies | 64 | Expired |
| US7005637B2 | Backside thinning of image array devices | Electricity | 48 | Expired |
| US5576559A | Heterojunction electron transfer device | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6919001B2 | Disk coating system | Electricity | 42 | Expired |
| US5684360A | Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas | Electricity | 40 | Expired |
| US6837766B2 | Unitary vacuum tube incorporating high voltage isolation | Electricity | 40 | Expired |
| US5425611A | Substrate handling and processing system | Emerging Cross-Sectional Technologies | 40 | Expired |
| US6307586A | Electron bombarded active pixel sensor camera incorporating gain control | Electricity | 39 | Expired |
| US8975668B2 | Backside-thinned image sensor using Al2 O3 surface passivation | Electricity | 36 | Active |
| US5738767A | Substrate handling and processing system for flat panel displays | Chemistry; Metallurgy | 30 | Expired |
| US5181556A | System for substrate cooling in an evacuated environment | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5523262A | Rapid thermal annealing using thermally conductive overcoat | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5374826A | Hybrid photomultiplier tube with high sensitivity | Electricity | 30 | Expired |
| US5287914A | System for substrate cooling in an evacuated environment | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6005247A | Electron beam microscope using electron beam patterns | Electricity | 25 | Expired |
| US5873989A | Methods and apparatus for linear scan magnetron sputtering | Electricity | 24 | Expired |
| US5253266A | MBE effusion source with asymmetrical heaters | Chemistry; Metallurgy | 24 | Expired |
| US8697553B2 | Solar cell fabrication with faceting and ion implantation | Emerging Cross-Sectional Technologies | 23 | Active |
| US5047821A | Transferred electron III-V semiconductor photocathode | Electricity | 23 | Expired |
| US6517691B1 | Substrate processing system | Emerging Cross-Sectional Technologies | 22 | Expired |
| US5475227A | Hybrid photomultiplier tube with ion deflector | Electricity | 22 | Expired |
| US7901539B2 | Apparatus and methods for transporting and processing substrates | Electricity | 21 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.