Scanning microscope comprising force-sensing means and position-sensitive photodetector
US5254854A · kind A · utility
97Cited by
10References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 4, 1991 |
| Grant date | Oct 19, 1993 |
| Priority date | — |
| Expiry date | Nov 4, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning, imaging system is described. A probe having a fine tip is disposed adjacent the surface of a sample and scanned in a pattern lying in a plane substantially parallel to the surface. Means are provided for oscillating the probe tip, substantially within the scanning plane. Shear forces, acting upon the probe tip in a substantially lateral direction, cause changes in the oscillation of the probe tip. Such changes are detected by a position-sensitive photodetector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.