Positive-working radiation-sensitive mixture and recording material for exposure to UV radiation containing polyfunctional compound having .alpha.-.beta.-keto ester units and sulfonate units

US5256517A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Horst Roeschert · Ober-Hilbersheim, DE
• Georg Pawlowski · Saitama, JP
• Hans-Joachim Merrem · Walldorf, DE
• Ralph R. Dammel · Flemington, US
• Walter Spiess · Dieburg, DE

Key dates

• Filing date: May 1, 1991
• Grant date: Oct 26, 1993
• Expiry date: May 1, 2011

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0163
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A positive-working radiation-sensitive mixture is described which essentially contains a photoactive component and a water-insoluble binder which is soluble, or at least swellable, in aqueous alkaline solution, wherein a compound is used, as photoactive component, which contains .alpha.-diazo-.beta.-keto ester units and sulfonate units of the formula I ##STR1## in which R.sup.1 and R.sup.2, independently of one another, are an unsubstituted or substituted aliphatic, cycloaliphatic, araliphatic or aromatic radical having 4 to 20 carbon atoms, it being possible for individual CH.sub.2 groups to be replaced by oxygen or sulfur atoms or by N or NH groups and/or contain keto groups, PA0 X is an unsubstituted or substituted aliphatic, cycloaliphatic, carbocyclic, heterocyclic or araliphatic radical having 2 to 22 carbon atoms, it being possible for individual CH.sub.2 groups to be replaced by oxygen or sulfur atoms or by the groups --NR.sup.3 --, --C(O)--0--, --C(O)--NR.sup.3 --, ##STR2## --NR.sup.3 --C(O)--NR.sup.4 --, --O--C(O)--NR.sup.3 --, ##STR3## or --O--C(O)--O--, or CH groups to be replaced by ##STR4## in which R.sup.3 and R.sup.4, independently of one another, are hydrogen or an…