Evacuation system and method therefor
US5259735A · kind A · utility
22Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 24, 1992 |
| Grant date | Nov 9, 1993 |
| Priority date | — |
| Expiry date | Apr 24, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An evacuation system in an ultra-high vacuum sputtering apparatus capable of shortening the pumping time of the system. A main pump, composed of a turbo-molecular pump and a baffle is positioned upstream of a main pump and cooled to a temperature in which argon gas is not absorbed and only water is absorbed. The pump and a vacuum chamber are separated by a valve. A pipeline circulates a heating medium to rapidly heat and cool the vacuum chamber for enabling a gas discharge from the vacuum chamber whereby the pumping time can be reduced and the overall production of the system can be increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.