Manabu Edamura
55Patents
11h-index
72Co-inventors
81Inventor score
Filing activity: Apr 24, 1992 → May 2, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6245202A | Plasma treatment device | Electricity | 67 | Expired |
| US5536359A | Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber | Electricity | 56 | Expired |
| US5556204A | Method and apparatus for detecting the temperature of a sample | Physics | 46 | Expired |
| US6388382B1 | Plasma processing apparatus and method | Electricity | 31 | Expired |
| US6180019A | Plasma processing apparatus and method | Electricity | 31 | Expired |
| US6833051B2 | Plasma processing apparatus and method | Electricity | 23 | Expired |
| US5259735A | Evacuation system and method therefor | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6756737B2 | Plasma processing apparatus and method | Electricity | 21 | Expired |
| US6911157B2 | Plasma processing method and apparatus using dynamic sensing of a plasma environment | Electricity | 14 | Expired |
| US6172321A | Method and apparatus for plasma processing apparatus | Electricity | 14 | Expired |
| US6034346A | Method and apparatus for plasma processing apparatus | Electricity | 13 | Expired |
| US10301794B2 | Construction machine | Fixed Constructions | 11 | Active |
| US6499424B2 | Plasma processing apparatus and method | Electricity | 10 | Expired |
| US8700275B2 | Hybrid construction machine and auxiliary control device used therein | Emerging Cross-Sectional Technologies | 9 | Active |
| US7194821B2 | Vacuum processing apparatus and vacuum processing method | Physics | 8 | Expired |
| US9290908B2 | Hybrid construction machine | Emerging Cross-Sectional Technologies | 7 | Active |
| US6481370B2 | Plasma processsing apparatus | Electricity | 6 | Expired |
| US9057173B2 | Hybrid construction machine | Emerging Cross-Sectional Technologies | 5 | Active |
| US8083889B2 | Apparatus and method for plasma etching | Electricity | 4 | Active |
| US7744721B2 | Plasma processing apparatus | Electricity | 4 | Active |
| US6850012B2 | Plasma processing apparatus | Electricity | 4 | Expired |
| US11230824B2 | Work machine | Fixed Constructions | 4 | Active |
| US7631548B2 | Scanning probe microscope | Physics | 4 | Active |
| US10323388B2 | Display system for construction machine | Physics | 4 | Active |
| US8011230B2 | Scanning probe microscope | Physics | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.