Low particulate reliability enhanced remote microwave plasma discharge device
US5262610A · kind A · utility
48Cited by
6References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 1991 |
| Grant date | Nov 16, 1993 |
| Priority date | — |
| Expiry date | Mar 29, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32357
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A remote microwave plasma generator comprises the combination of two parts, a tunable microwave applicator, and a double wall, water cooled quartz/sapphire tube. The tunable waveguide applicator is a nonconducting adjustable waveguide short with a quartz/sapphire tube inserted through it. The adjustable end is one quarter of a guide wavelength from the center line of the tube, and the other side is 0.1 inches less in distance, thus permitting the applicator to be used with a triple stub tuner for optimum coupling.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.