Superconducting detector and method of making same
US5264375A · kind A · utility
35Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 15, 1992 |
| Grant date | Nov 23, 1993 |
| Priority date | — |
| Expiry date | Apr 15, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/703
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detector useful for detecting infrared (IR) radiation is described which is formed of an epitaxial film of superconductive material having a high transition temperature Tc. Specifically, an oxide of yttrium barium and copper is preferred for the high Tc material. The sensor is formed on a single crystalline silicon body suspended by a silicon nitride membrane over a gap formed in a silicon base body and thermally isolated thereby.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.