Martin Schmidt
55Patents
21h-index
97Co-inventors
91Inventor score
Filing activity: Nov 19, 1986 → Feb 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5164558A | Micromachined threshold pressure switch and method of manufacture | Emerging Cross-Sectional Technologies | 151 | Expired |
| US5511428A | Backside contact of sensor microstructures | Electricity | 151 | Expired |
| US5932940A | Microturbomachinery | Mechanical Engineering; Lighting; Heating | 142 | Expired |
| US6392313B1 | Microturbomachinery | Mechanical Engineering; Lighting; Heating | 113 | Expired |
| US5238223A | Method of making a microvalve | Mechanical Engineering; Lighting; Heating | 106 | Expired |
| US4943750A | Electrostatic micromotor | Electricity | 102 | Expired |
| US6692952B1 | Cell analysis and sorting apparatus for manipulation of cells | Physics | 101 | Expired |
| US5043043A | Method for fabricating side drive electrostatic micromotor | Electricity | 96 | Expired |
| US5199298A | Wall shear stress sensor | Performing Operations; Transporting | 73 | Expired |
| US6671078B2 | Electrostatic zipper actuator optical beam switching system and method of operation | Physics | 73 | Expired |
| US4896098A | Turbulent shear force microsensor | Physics | 69 | Expired |
| US4997521A | Electrostatic micromotor | Electricity | 65 | Expired |
| US6541676B1 | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions | Emerging Cross-Sectional Technologies | 63 | Expired |
| US5142781A | Method of making a microvalve | Emerging Cross-Sectional Technologies | 60 | Expired |
| US8128753B2 | Method and apparatus for depositing LED organic film | Chemistry; Metallurgy | 55 | Active |
| US6315423A | Micro machined mirror | Physics | 45 | Expired |
| US6810899B2 | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6932951B1 | Microfabricated chemical reactor | Performing Operations; Transporting | 35 | Expired |
| US5264375A | Superconducting detector and method of making same | Emerging Cross-Sectional Technologies | 35 | Expired |
| US5129981A | Method of selectively etching silicon | Emerging Cross-Sectional Technologies | 31 | Expired |
| US6939632B2 | Thermally efficient micromachined device | Emerging Cross-Sectional Technologies | 28 | Expired |
| US7691244B2 | Microfluidic pumps and mixers driven by induced-charge electro-osmosis | Performing Operations; Transporting | 20 | Expired |
| US6454421B2 | Dual axis micro machined mirror device | Physics | 18 | Expired |
| US6647088B1 | Production of a dense mist of micrometric droplets in particular for extreme UV lithography | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7619232B2 | Method and device for producing extreme ultraviolet radiation or soft X-ray radiation | Electricity | 16 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.