Photoresist composition with aromatic novolak binder having a weight-average molecular weight in excess of 1500 Daltons
US5266440A · kind A · utility
17Cited by
9References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 1, 1993 |
| Grant date | Nov 30, 1993 |
| Priority date | — |
| Expiry date | Mar 1, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0226
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photoresist comprising a light sensitive component and an essentially aromatic alkali soluble novolak resin comprising the product resulting from the acid condensation of an aromatic aldehyde and a phenol where the resin has a molecular weight in excess of 1,500 and a glass transition temperature in excess of 125.degree. C. If desired, the aromatic novolak resin may be blended with a conventional novolak resin to regulate the glass transition temperature of the resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.