Wafer probe station with integrated environment control enclosure
US5266889A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 1992 |
| Grant date | Nov 30, 1993 |
| Priority date | — |
| Expiry date | May 29, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclosure is maintained despite the fact that the probe and chuck positioning mechanisms extend partially outside the enclosure, with positioning members extending movably between the interior and exterior of the enclosure. Sealing is maintained by movable sealing members at the locations where the positioning members penetrate the enclosure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.