Patent assignee · US · COMPANY

Cascade Microtech, Inc.

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248Patents
106Active
248Granted
49Portfolio score

Filing activity: Apr 30, 1984 → Apr 8, 2016 · 82 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6549106B2 Waveguide with adjustable backshort Electricity 332 Expired
US4697143A Wafer probe Physics 213 Expired
US5506515A High-frequency probe tip assembly Physics 165 Expired
US5565788A Coaxial wafer probe with tip shielding Physics 151 Expired
US5610529A Probe station having conductive coating added to thermal chuck insulator Physics 142 Expired
US5266889A Wafer probe station with integrated environment control enclosure Electricity 141 Expired
US5729150A Low-current probe card with reduced triboelectric current generating cables Physics 141 Expired
US5914613A Membrane probing system with local contact scrub Physics 130 Expired
US4849689A Microwave wafer probe having replaceable probe tip Physics 129 Expired
US4827211A Wafer probe Physics 128 Expired
US5457398A Wafer probe station having full guarding Electricity 126 Expired
US5345170A Wafer probe station having integrated guarding, Kelvin connection and shielding systems Electricity 122 Expired
US6137302A Low-current probe card with reduced triboelectric current generating cables Physics 115 Expired
US5045781A High-frequency active probe having replaceable contact needles Physics 111 Expired
US5101453A Fiber optic wafer probe Physics 106 Expired
US4858160A System for setting reference reactance for vector corrected measurements Physics 100 Expired
US6724205B1 Probe for combined signals Physics 99 Expired
US7009383B2 Wafer probe station having environment control enclosure Physics 96 Expired
US6806724B2 Probe for combined signals Physics 96 Expired
US6256882A Membrane probing system Emerging Cross-Sectional Technologies 94 Expired
US4764723A Wafer probe Physics 93 Expired
US6232788A Wafer probe station for low-current measurements Electricity 92 Expired
US6232789A Probe holder for low current measurements Physics 88 Expired
US6578264B1 Method for constructing a membrane probe using a depression Emerging Cross-Sectional Technologies 85 Expired
US7187188B2 Chuck with integrated wafer support Physics 85 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.