Fluid dispersion head for CVD appratus
US5268034A · kind A · utility
65Cited by
11References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 24, 1992 |
| Grant date | Dec 7, 1993 |
| Priority date | — |
| Expiry date | Mar 24, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/455
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A fluid distribution head of this invention includes a chamber for fluid flow including a perforated plate. The perforated plate is internally supported by a structural support to avoid deformation of the plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.