Inventor · Hsinchu, TW

Michael Vukelic

3Patents
2h-index
2Co-inventors
34Inventor score

Filing activity: Mar 24, 1992 → May 10, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US5268034A Fluid dispersion head for CVD appratus Chemistry; Metallurgy 65 Expired
US5286519A Fluid dispersion head Chemistry; Metallurgy 14 Expired
US8568597B2 Process for purifying silicon source material by high gravity rotating packed beds Chemistry; Metallurgy 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.