Method of mounting a target plate to be cooled into a vacuum process chamber, an arrangement of a target plate, a target plate and a vacuum chamber
US5269894A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 4, 1992 |
| Grant date | Dec 14, 1993 |
| Priority date | — |
| Expiry date | May 4, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3497
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of mounting a vacuum process arrangement comprises providing a cooling plate having at least one channel and at least one bayonet locking means. A heat conducting membrane is then placed over each channel of the cooling plate. A target plate having at least one bayonet locking means is also provided. The locking plate is then locked to the cooling plate over the channels by engaging the bayonet locking means of the target plate with the bayonet locking means of the cooling plate by limited relative axial and rotational movement between the plates. Finally, a cooling medium is introduced in the channels of the cooling plate and pressurized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.