Secondary-ion mass spectrometry apparatus using field limiting method
US5278407A · kind A · utility
16Cited by
6References
10Claims
0Family size
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Key dates
| Filing date | Apr 24, 1992 |
| Grant date | Jan 11, 1994 |
| Priority date | — |
| Expiry date | Apr 24, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2527
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A secondary-ion mass spectrometry apparatus using a field limiting method includes an optical system for primary ions, a sample chamber, and an optical system for secondary ions, and a total ion monitor (TIM) interposed between an electric sector and a magnetic sector of the optical system for secondary ions. A field-limited image (or TIM image) from the TIM can be observed or monitored continually by a CRT, thereby making it possible to grasp quantitatively the charging state of a sample surface. The apparatus may further include an adjuster for adjusting quantatively the charging state of the sample surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.