Wafer probing test machine
US5278494A · kind A · utility
575Cited by
6References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 19, 1992 |
| Grant date | Jan 11, 1994 |
| Priority date | — |
| Expiry date | Feb 19, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer probing test machine including a loading/unloading section defined by a first frame to enclose plurality of cassette stages therein, a test section defined by a second frame for enclosing a test stage therein, an elevator for moving at least one of the cassette stages up and down, and a wafer transfer system having a multi-jointed arm for taking out the wafer from a cassette and transferring the wafer onto the test stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.