Tokyo Electron Yamanashi Limited
79Patents
0Active
79Granted
40Portfolio score
Filing activity: Jun 12, 1991 → Aug 3, 2000
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5382311A | Stage having electrostatic chuck and plasma processing apparatus using same | Electricity | 899 | Expired |
| US6162323A | Plasma processing apparatus | Electricity | 606 | Expired |
| US5278494A | Wafer probing test machine | Electricity | 575 | Expired |
| USD363464S | Electrode for a semiconductor processing apparatus | General | 477 | Expired |
| US6110287A | Plasma processing method and plasma processing apparatus | Electricity | 238 | Expired |
| US5325052A | Probe apparatus | Physics | 157 | Expired |
| US6074518A | Plasma processing apparatus | Electricity | 157 | Expired |
| US5804983A | Probe apparatus with tilt correction mechanisms | Physics | 156 | Expired |
| US5521522A | Probe apparatus for testing multiple integrated circuit dies | Physics | 147 | Expired |
| US5410259A | Probing device setting a probe card parallel | Physics | 146 | Expired |
| US5321352A | Probe apparatus and method of alignment for the same | Physics | 138 | Expired |
| US5404111A | Probe apparatus with a swinging holder for an object of examination | Physics | 117 | Expired |
| US5310453A | Plasma process method using an electrostatic chuck | Electricity | 108 | Expired |
| US5550482A | Probe device | Physics | 108 | Expired |
| US5625526A | Electrostatic chuck | Electricity | 105 | Expired |
| US5642056A | Probe apparatus for correcting the probe card posture before testing | Physics | 103 | Expired |
| US5423936A | Plasma etching system | Electricity | 94 | Expired |
| US5314603A | Plasma processing apparatus capable of detecting and regulating actual RF power at electrode within chamber | Electricity | 91 | Expired |
| US5275683A | Mount for supporting substrates and plasma processing apparatus using the same | Emerging Cross-Sectional Technologies | 83 | Expired |
| US5568054A | Probe apparatus having burn-in test function | Physics | 77 | Expired |
| US5611655A | Vacuum process apparatus and vacuum processing method | Emerging Cross-Sectional Technologies | 77 | Expired |
| US5509771A | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 73 | Expired |
| US5640101A | Probe system and probe method | Physics | 72 | Expired |
| US5980767A | Method and devices for detecting the end point of plasma process | Performing Operations; Transporting | 70 | Expired |
| US5147493A | Plasma generating apparatus | Electricity | 66 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.