Minute particle loading method and apparatus
US5279045A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 1991 |
| Grant date | Jan 18, 1994 |
| Priority date | — |
| Expiry date | Jan 31, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/15787
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention is to define an enclosed space by covering a holder which can hold numerous minute particles, and introduce a fluid into the enclosed space to stir up the numerous minute particles within the enclosed space with a turbulent flow of the fluid so that the minute particles are placed in and held by the holder After stirring up and loading the minute particles in the holder, the fluid is introduced into the enclosed space again to recover the remaining minute particles which have not been held by the holder. The number of minute particles required for one cycle of the loading operation are taken out by moving a particle push-up shaft vertically, having a recess at the distal end thereof, within a stocker which stores a large number of minute particles, and then delivered to the enclosed space with the fluid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.