Thermal mass flow sensor
US5279154A · kind A · utility
44Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 18, 1992 |
| Grant date | Jan 18, 1994 |
| Priority date | — |
| Expiry date | Sep 18, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F5/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vertical flow thermal mass flow sensor for a vertical flow thermal mass flow meter of a vertical flow thermal mass flow controller has a sensor tube having a gas inlet for receiving a gas to be metered. The sensor tube includes a first curved convection trap and a second curved convection trap for preventing convective flow of the gas through the sensor tube. A thermally responsive winding is wound about the sensor tube and is energized from a source of electrical energy. The resistance of the thermally responsive winding is responsive to the rate of flow of the gas through the sensor tube and provides an indication thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.