Unit Instruments
🏢 View company profile →20Patents
0Active
20Granted
34Portfolio score
Filing activity: Mar 14, 1988 → Aug 23, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5992463A | Gas panel | Emerging Cross-Sectional Technologies | 85 | Expired |
| US5730181A | Mass flow controller with vertical purifier | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5925829A | Method and apparatus for determining a rate of flow of gas by a rate of change of pressure | Physics | 48 | Expired |
| US6394138B1 | Manifold system of removable components for distribution of fluids | Emerging Cross-Sectional Technologies | 46 | Expired |
| US6044701A | Thermal mass flow controller having orthogonal thermal mass flow sensor | Physics | 46 | Expired |
| US5279154A | Thermal mass flow sensor | Physics | 44 | Expired |
| US5303731A | Liquid flow controller | Emerging Cross-Sectional Technologies | 36 | Expired |
| US6293310A | Gas panel | Emerging Cross-Sectional Technologies | 36 | Expired |
| US4858643A | Fluid flow stabilizing apparatus | Emerging Cross-Sectional Technologies | 32 | Expired |
| US5803507A | Apparatus for handling process fluid | Emerging Cross-Sectional Technologies | 32 | Expired |
| US6425281B1 | Pressure insensitive gas control system | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6374859B1 | Manifold system for enabling a distribution of fluids | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6189570A | Gas panel | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6474700B2 | Gas panel | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6192938A | Gas panel | Emerging Cross-Sectional Technologies | 21 | Expired |
| US4928048A | Fast response control circuit | Physics | 18 | Expired |
| US6435215B1 | Gas panel | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6142539A | Gas panel | Emerging Cross-Sectional Technologies | 15 | Expired |
| US4913192A | Gas flow control apparatus | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6539792B2 | Method and apparatus for balancing resistance | Physics | 6 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.