Process for depositing wear-resistant coatings
US5279866A · kind A · utility
16Cited by
0References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 10, 1993 |
| Grant date | Jan 18, 1994 |
| Priority date | — |
| Expiry date | Jun 10, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/325
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for depositing on a sample surface a smooth, wear-resistant coating including the steps of providing a vacuum processing chamber for holding the sample to be coated, introducing into the processing chamber coating-forming reactants for deposition on the sample surface, and supplying to the processing chamber a plasma stream with an electron temperature of up to 10 eV, a directed ion energy of 5 to 50 eV, and an ion flux at the sample in the range of 0.1 to 100 milliamps per square centimeter for transferring energy to the deposited material to form the smooth coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.