Inventor · Winchester, MA, US

Lawrence P. Bourget

6Patents
6h-index
13Co-inventors
52Inventor score

Filing activity: Jun 10, 1993 → Jun 23, 1997

Most-cited inventions

PatentTitleAreaCited byStatus
US6051114A Use of pulsed-DC wafer bias for filling vias/trenches with metal in HDP physical vapor deposition Electricity 215 Expired
US5792522A High density plasma physical vapor deposition Electricity 52 Expired
US5688382A Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate Electricity 40 Expired
US5279866A Process for depositing wear-resistant coatings Chemistry; Metallurgy 16 Expired
US5405645A High growth rate plasma diamond deposition process and method of controlling same Chemistry; Metallurgy 14 Expired
US5518759A High growth rate plasma diamond deposition process and method of controlling same Chemistry; Metallurgy 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.