Patent · US Expired

Pneumatically and electrostatically driven scanning tunneling microscope

US5283437A · kind A · utility

61Cited by

2References

20Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Johann Greschner · Neckartenzlingen, DE
Martin Nonnenmacher, deceased · Schenefeld, DE
Olaf Wolter · Aidlingen, DE

Key dates

Filing date	Feb 17, 1993
Grant date	Feb 1, 1994
Priority date	—
Expiry date	Feb 17, 2013

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/875
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A scanning tunneling microscope is disclosed with the probe tip formed as an integral part of a membrane. A counter-electrode is formed on the membrane and four electrodes are provided spaced apart from the counter-electrode. The tip is scanned by means of these electrodes. Coarse positioning of the tip along the Z axis is done by applying pressure or vacuum to the membrane. Also disclosed is the method of making the scanning tunneling microscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.