Contractless mode of electroreflectance
US5287169A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1992 |
| Grant date | Feb 15, 1994 |
| Priority date | — |
| Expiry date | Mar 31, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/1717
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for a contactless mode of electroreflectance (ER) which utilizes a condenser-like system, of which the front electrode is light transparent, i.e., for instance, consists of a transparent conductive coating on a transparent substrate which is separated from the sample surface by a thin layer of air. With the use of the method and apparatus of this invention, the contactless electroreflectance spectra could be measured at 300K from a number of materials including semi-insulating bulk GaAs, bulk Si, bulk Hg.sub.0.75 Cd.sub.0.25 Te, a GaAs structure with large uniform electric field and a GaAs/GaAlAs coupled double quantum well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.