Hydrogen evolution analyzer

US5288645A · kind A · utility

Assignee

• MTM Engineering, Inc. · US

Inventors

• Masato Toshima · Sunnyvale, US
• Jerry Wong · Fremont, US

Key dates

• Filing date: Sep 4, 1992
• Grant date: Feb 22, 1994
• Expiry date: Sep 4, 2012

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T436/20
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Method for determining temperature ranges at which a selected gas evolves from a specimen of a selected material, bulk or surface of a metal, semiconductor, or insulator, and the probable source of that gas in each such temperature range. A specimen is placed in an evacuated and baked-out tube, and the specimen temperature T is increased according to a selected time-dependent temperature pattern over a temperature range. As temperature T(t) increases, pressure p(t) of any gas evolving in the tube is measured for a sequence of times t. A total pressure derivative, dp/dT=(dp/dt)(dT/dt).sup.-1, is determined, identifying one or more peak temperatures, each having a peak temperature range corresponding to specimen emission of at least one gas by breaking a bond containing an atom or molecule of that emitted gas. Partial pressure rises in the tube at each peak temperature are monitored and converted to an equivalent gas concentration. In a second embodiment, two tubes, with only one containing a specimen, are used for analyzing the differential pressure .DELTA.p=p1- p2 and differential pressure derivative d(.DELTA.p)/dT. In a third embodiment, both tubes contain specimens, and one or mo…