Masato Toshima
34Patents
19h-index
41Co-inventors
81Inventor score
Filing activity: Apr 20, 1987 → Nov 3, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4951601A | Multi-chamber integrated process system | Emerging Cross-Sectional Technologies | 997 | Expired |
| US5882165A | Multiple chamber integrated process system | Electricity | 591 | Expired |
| US5292393A | Multichamber integrated process system | Electricity | 286 | Expired |
| US5556501A | Silicon scavenger in an inductively coupled RF plasma reactor | Electricity | 246 | Expired |
| US6518195B1 | Plasma reactor using inductive RF coupling, and processes | Electricity | 113 | Expired |
| US4785962A | Vacuum chamber slit valve | Emerging Cross-Sectional Technologies | 107 | Expired |
| US5186594A | Dual cassette load lock | Emerging Cross-Sectional Technologies | 106 | Expired |
| US6488807B1 | Magnetic confinement in a plasma reactor having an RF bias electrode | Electricity | 99 | Expired |
| US6068784A | Process used in an RF coupled plasma reactor | Electricity | 96 | Expired |
| US6007675A | Wafer transfer system and method of using the same | Emerging Cross-Sectional Technologies | 92 | Expired |
| US6251792A | Plasma etch processes | Electricity | 82 | Expired |
| US6545420B1 | Plasma reactor using inductive RF coupling, and processes | Electricity | 61 | Expired |
| US5944940A | Wafer transfer system and method of using the same | Emerging Cross-Sectional Technologies | 55 | Expired |
| US5900105A | Wafer transfer system and method of using the same | Emerging Cross-Sectional Technologies | 50 | Expired |
| US5308417A | Uniformity for magnetically enhanced plasma chambers | Electricity | 40 | Expired |
| US5769588A | Dual cassette load lock | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6454519B1 | Dual cassette load lock | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6146469A | Apparatus and method for cleaning semiconductor wafers | Emerging Cross-Sectional Technologies | 36 | Expired |
| US5753133A | Method and apparatus for etching film layers on large substrates | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6224680A | Wafer transfer system | Electricity | 16 | Expired |
| US6454508B2 | Dual cassette load lock | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7695233B2 | Substrate processing apparatus | Electricity | 11 | Active |
| US6599076B2 | Dual cassette load lock | Emerging Cross-Sectional Technologies | 10 | Expired |
| US8444364B2 | Auto-sequencing multi-directional inline processing apparatus | Emerging Cross-Sectional Technologies | 9 | Active |
| US5288645A | Hydrogen evolution analyzer | Emerging Cross-Sectional Technologies | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.