Patent · US Expired

Photosensitive material having a silicon-containing polymer

US5290899A · kind A · utility

11Cited by
3References
1Claims
0Family size

Assignees

Inventors

Key dates

Filing dateSep 28, 1992
Grant dateMar 1, 1994
Priority date
Expiry dateSep 28, 2012

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/0757
  • WIPO fieldMacromolecular chemistry, polymers
  • WIPO sectorChemistry

Abstract

A silicon-containing polymer comprising repeating units of silicon-containing cyclic compound, represented by a general formula (I) ##STR1## (wherein m and n are zero or a positive integer, respectively, however m+n>0, and X is any of an alkyl group, alkoxy group, phenyl group, naphthyl group, substituted phenyl group and substituted naphthyl group or a mixture of these, and the substituent of said substituted phenyl group or substituted naphthyl group indicates any of halogen atom, halogenated alkyl group, amino group, aminoalkyl group and nitro group or a mixture of these), and a photosensitive material containing said silicon-containing polymer are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.