Patent · US Expired

Sputtering unit

US5292419A · kind A · utility

14Cited by

2References

12Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Gerhard Moses · Hanau, DE
Klaus Michael · Gelnhausen, DE
Ulrich Patz · Gelnhausen, DE
Michael Scherer · Crimmitschau, DE

Key dates

Filing date	Mar 24, 1992
Grant date	Mar 8, 1994
Priority date	—
Expiry date	Mar 24, 2012

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/566
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The invention relates to a sputtering unit with an electrode (3) and a target (2) connected with this electrode (3) wherein this target (2) is interchangeable. Herein a consumed target (2) is replaced by a fresh and pre-sputtered target (7) thereby that the complete electrode (3) is replaced by a new electrode (6).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.