Specimen heating device for use with an electron microscope
US5296669A · kind A · utility
7Cited by
6References
7Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 28, 1993 |
| Grant date | Mar 22, 1994 |
| Priority date | — |
| Expiry date | May 28, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A specimen to be irradiated with an electron beam is supported by a heating member secured detachably to a specimen holder and the heating member, a power supply therefor and electric conductive lines for conducting a electric power from the power supply to the heating member are integrated into the specimen holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.