Scanning tunneling microscope
US5296704A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 1992 |
| Grant date | Mar 22, 1994 |
| Priority date | — |
| Expiry date | Jan 14, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/869
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.