Patent · US Expired

Scanning tunneling microscope

US5296704A · kind A · utility

29Cited by
8References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 14, 1992
Grant dateMar 22, 1994
Priority date
Expiry dateJan 14, 2012

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/869
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.