Transportation-transfer device for an object of treatment
US5297910A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Feb 13, 1992 |
| Grant date | Mar 29, 1994 |
| Priority date | — |
| Expiry date | Feb 13, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for transporting and transferring objects of treatment arranged in a down flow to a plurality of treatment sections for treating the objects comprises a transportation section movable between the treatment sections, a first drive mechanism for moving the transportation section, a first arm movably attached to the transportation section and used for those objects of treatment which are adjusted to a predetermined temperature in the treatment sections, a second arm movably attached to the transportation section and used for the other objects of treatment than the ones adjusted in temperature, and a second drive mechanism for separately moving the first and second arms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.