Mechanically stable field emission gun
US5304888A · kind A · utility
26Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 1992 |
| Grant date | Apr 19, 1994 |
| Priority date | — |
| Expiry date | Jan 24, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3175
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved electron or ion gun support structure includes a hollow cylinder for rigidly connecting the source assembly to the source-motion ring, with the source cathode and associated lens extending into the hollow portion of the cylinder. The gun is thus made very stable and less susceptible to outside vibrations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.