High precision stepping aligner having a spiral stepping pattern
US5311282A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1992 |
| Grant date | May 10, 1994 |
| Priority date | — |
| Expiry date | Mar 19, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high precision stepping aligner includes a stage for carrying thereon an object and drivable to move the object stepwise relative to an exposing position so as to align a plurality of portions of the object in succession with the exposing position, where each of the portions is exposed to exposure light. The stage is moved stepwise first in the X-direction and then in the Y-direction. Thereafter, the stepping movement in the X-direction and the stepping movement in the Y-direction are repeated one after another so that the stage traces a substantially spiral stepping pattern. A mirror for reflecting a beam of light for positioning the stage is disposed on the stage with a heat insulating material interposed therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.