Multi-compartment eletroplating system

US5312532A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Panayotis Andricacos · Ossining, US
• Moritz Branger · Los Altos, US
• Robert M. Browne · San Jose, US
• John O. Dukovic · Pleasantville, US
• Benjamin W. B. Fu · Cupertino, US
• Robert Hitzfeld · San Jose, US
• Matteo Flotta · Armonk, US
• Donald R. McKenna · San Jose, US
• Lubomyr T. Romankiw · Briarcliff Manor, US
• Saeed Sahami · San Jose, US

Key dates

• Filing date: Jan 15, 1993
• Grant date: May 17, 1994
• Expiry date: Jan 15, 2013

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S204/07
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A multi-compartment electroplating system for electroplating two or more objects simultaneously such that the electrodeposited material is substantially uniform in thickness and composition. Electroplating solution is circulated between a reservoir and a multi-compartment tank which has one cathode-paddle-anode (CPA) assembly for each compartment. Each CPA assembly has an anode, a cathode adapted for holding a wafer and employing a single thieving electrode which covers all of the floor of the compartment not covered by the wafer, and a paddle. Also included is a cover which houses a single linear motor for driving all of the paddles in synchrony.