Patent · US Expired

Metal ion source and a method of producing metal ions

US5315121A · kind A · utility

11Cited by

2References

7Claims

0Family size

Assignee

Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

Andreas Kluge · Cologne, DE
Peter Nelle · Munich, DE

Key dates

Filing date	Dec 13, 1991
Grant date	May 24, 1994
Priority date	—
Expiry date	Dec 13, 2011

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31701
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

For simplifying the structure of a metal ion source, in particular for imnting into semiconductor wafers small doses of metals which are hard to vaporize, the metal ion source includes an electrically heatable thermionic cathode in the form of a heating wire within an ion chamber, the heating wire being arranged adjacent a metallic component, which consists of the metal intended to give off the metal ions, and being essentially at the potential of the metallic component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.