Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit
US5315237A · kind A · utility
115Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 6, 1991 |
| Grant date | May 24, 1994 |
| Priority date | — |
| Expiry date | Aug 6, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A touch sensing unit has an ac signal generator for supplying an ac signal to a semiconductor chip of a semiconductor wafer or a test probe needle, and a touch sensor for sensing formation of an ac signal loop passing an ac signal of the signal generator when the test probe needle and the IC chip are touched with each other by being relatively approached to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.