Apparatus for forming a thin film with a mist forming means
US5316579A · kind A · utility
74Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 1992 |
| Grant date | May 31, 1994 |
| Priority date | — |
| Expiry date | May 4, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/826
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus are disclosed for generating fine mists of liquids using a rotating turbine blade disposed within an enclosure. A mixture of a liquid and a carrier gas are flowed into the enclosure such that it immediately impacts on the rotating turbine blade disposed near a lower end of the enclosure, and the resulting mist is withdrawn under vacuum near an upper end of the enclosure. A method and apparatus are also disclosed for chemical vapor deposition of thin films of complex chemical compounds using the discussed mists.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.