Maleimide-alt-silylstyrene copolymer
US5317069A · kind A · utility
4Cited by
1References
4Claims
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Assignee
Inventors
Key dates
| Filing date | Jun 7, 1993 |
| Grant date | May 31, 1994 |
| Priority date | — |
| Expiry date | Jun 7, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G73/12
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
The present invention discloses a maleimide-alt-trialkylsilylstyrene copolymer having the formula: ##STR1## wherein: R.sub.1 is H or methyl; PA1 R.sub.2 is C.sub.1 -C.sub.3 alkyl; and PA1 n is an integer such that the copolymer has a weight average molecular weight of 25,000-120,000. The copolymer of formula (I) is useful in the preparation of a photoresist composition. A process for preparing the copolymer of formula (I) is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.