Probe apparatus for probing an object held above the probe card
US5321453A · kind A · utility
106Cited by
14References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 1992 |
| Grant date | Jun 14, 1994 |
| Priority date | — |
| Expiry date | Aug 3, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe apparatus having a probe card having plurality of probes, a member arranged above the probe card to hold an object to be probed, and a test head electrically connected to the probes of the probe card.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.