Growth of a,b-axis oriented perovskite thin films over a buffer/template layer
US5324714A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 1993 |
| Grant date | Jun 28, 1994 |
| Priority date | — |
| Expiry date | May 19, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/732
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method, and the resulting structure, of growing a superconducting perovskite thin film of, for example, YBa.sub.2 Cu.sub.3 O.sub.7-x. A buffer layer of, for example, the perovskite PrBa.sub.2 Cu.sub.3 O.sub.7-y, is grown on a crystalline (001) substrate under conditions which favor growth of a,b-axis oriented material. Then the YBa.sub.2 Cu.sub.3 O.sub.7-x layer is deposited on the buffer layer under changed growth conditions that favor growth of c-axis oriented material on the substrate, for example, the substrate temperature is raised by 110.degree. C. However, the buffer layer acts as a template that forces the growth of a,b-axis YBa.sub.2 Cu.sub.3 O.sub.7-x, which nonetheless shows a superconducting transition temperature near that of c-axis oriented films.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.