Device for corpuscular-optical examination and/or processing of material samples
US5329125A · kind A · utility
15Cited by
5References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 10, 1992 |
| Grant date | Jul 12, 1994 |
| Priority date | — |
| Expiry date | Nov 10, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0245
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a device for corpuscular-optical examination and/or processing of material samples in which the column and the table system are rotatable relative to one another about a first axis of rotation which encloses a specific angle of inclination with a perpendicular to the object plane, the column being arranged in such a way that its optical axis forms the same angle of inclination with the first axis of rotation. A device of this type is distinguished over known constructions by a substantially simpler construction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.