Electromagnetic rebalanced micromechanical transducer
US5331852A · kind A · utility
27Cited by
102References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 16, 1991 |
| Grant date | Jul 26, 1994 |
| Priority date | — |
| Expiry date | Dec 16, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for electromagnetically rebalancing a micromechanical transducer via a plurality of current carrying electrodes disposed beneath or above the transducer interacting with a current carrying conductor disposed on the transducer. In a first embodiment, the micromechanical transducer comprises a micromechanical accelerometer having electromagnetic rebalance of an asymmetric plate. In an alternative embodiment, the transducer comprises a micromechanical gyroscope having electromagnetic driving of an outer gimbal and electromagnetic rebalance of a sense gimbal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.