Polarizing interferometric displacement measuring arrangement

US5333048A · kind A · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Dieter Michel · Traunstein, DE
• Erwin Spanner · Traunstein, DE

Key dates

• Filing date: Apr 20, 1993
• Grant date: Jul 26, 1994
• Expiry date: Apr 20, 2013

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/38
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A polarizing optical arrangement wherein a linearly polarized signal beam cluster is generated. The signal beam cluster is created from interfering partial beam clusters and is linearly polarized. The azimuth of oscillation of the linearly polarized signal beam cluster is dependent on the mutual phase relationship of the aforementioned partial beam clusters. A splitter grating splits the linearly polarized signal beam cluster into partial beam clusters that are analyzed by analyzers, detected by photoelectric transducers and phase-shifted electrically from one another.